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970-240-9429

Fax
970-240-8996

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Address
P.O. Box 177
Montrose, CO 81402

LOT Vacuum’s design provides the shortest vacuum path for any pump in its class.  This advantage moves particulate through the pump quickly while contacting very few parts.  This feature  provides less opportunity for particulate to bind the pumping mechanism,  which results in trouble free operation over longer periods of time.  This design advantage has been proven for years in the most demanding 150mm to 300mm Silicon Nitride CVD applications and aggressive chemistries and is now bringing  market leadership to MEMS Etching.

Click Here for a Power Point review of the unique advantages of
LOT’s vacuum pump design