Anest Iwata scroll pumps are air-cooled, do not require nitrogen purge, and provide clean pumping at low capital cost. The unique patented balance design overcomes problems associated with other scroll pumps such as low Mean Time Between Failure, vibration, tip seal particle generation and premature bearing failure. AI’s modular design provides for quick on-site module exchanges when maintenance is needed.

The Benefits of Oil Free Pumping are many and an AI pump may be the immediate solution to oil contamination and disposal issues presented by your existing oil lubricated pumps.

ISP Series Pumps are designed for dry clean inert gas pumping applications with < 25 grams of water per day in the vacuum stream.  They are cool, quiet, and highly efficient due to their unique patented balanced design.

DVSL Series Pumps are designed for high vapor load pumping and have their bearings completely isolated from the vacuum stream. Bearing lubrication is not subject to attack by process vapors, nor is there is any risk of back-migration of lubricant into the vacuum area.  DVSL pumps can handle vapor loads comparable to an RV pump using gas ballast techniques.

Typical applications:
Scanning electron microscopes, ion implanters, linear accelerators, sputtering, turbomolecular pump backing, load locks, surface analysis, lamp/tube evacuation, leak detectors, hermetic systems, electron beam processes, laboratory applications, sputtering systems.