LOT DD Series Pumps are proven industry leaders in the most aggressive CVD, Metal, and Diffusion vacuum pumping applications. The Design Advantages of the DD series pumps are based on a dual path screw design that provides the following benefits:

Industry Leading MTBF
Simplicity of design minimizes parts and wear

Minimal Particle Deposition
Short Gas Path enables quick exit of particles

Minimal Process Deposition
Unique Temperature control enables heated or cooled rotors

Extended Bearing Life
Split Flow Design & Simply Supported Bearings cancel loads

Extended Seal Life
Non-contact Piston Ring Labyrinth superior to contact shaft seals