SynSysCo offers a line of very unique Foreline and Exhaust line gas management technologies.
Our systems have been tested for years in the most critical and aggressive 300mm semiconductor applications in the world involving gasses such as SiH4, H2 and WF6. They have proven to extend MTBF of process pumps.
If your goals include, Capital Asset Protection, Personnel Health and Safety Protection and Environmental Emissions Protection then SynSycCo’s line of Exhaust Management Devices will assist in meeting these goals.
Hot Purge Systems (HPS)
SynSysCo’s HPS System combines hot nitrogen injection with turbulent gas flow to eliminate exhaust line clogging caused by the by-products of deposition, etch and ion implant processes. It is quiet, efficient, and has a very competitive installed and operating cost when compared to external heating jacket technology. >>more information
Foreline Reactors
SynSysCo’s Foreline Reactors uniquely react unspent gasses and collect deposits. They have been tested in a series of applications yielding results that often double or triple MTBF performance of process pumps in applications that generate deposition by-products. >>more information
Abatement Systems
Please email us for additional information on products.
Email
sales@synsysco.com
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