Reasons for Using a Foreline Reactor
- Semiconductor and LCD require larger wafers, larger chambers and higher gas flows.
- High Gas Flows produce larger amounts of reactive by-products.
- By-products cool and solidify on gas wetted surfaces in the pump body, pump housings, and rotors which shortens the life of the pump
- Foreline Reactor Installation Yields Greatly Extended Pump Life and Significantly Increased MTBR
- Foreline Reactors are Specified and configured based on the Process Type being Supported and can be 1 of 3 types:
1. Hot/Cold configuration (Dual or Single Canister)
2. Hot Configuration
3. Cold Configuration
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2500 HOT/ COLD Dual Reactor & Controller
HOT & COLD Reactor 3D Model
& Cross Section
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