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SynSysCo’s HPS System combines hot nitrogen injection with turbulent gas
flow to eliminate exhaust line clogging caused by the by-products of deposition,
etch and ion implant processes. It is quiet, efficient, and has a very competitive
installed and operating cost when compared to external heating jacket technology.
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90 Days After HPS |
HPS is an excellent choice for exhaust line management of CVD, metal etch, ion implant and diffusion processes such as: |
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APPLICATIONS
- CVD
- PEOX / PE-TEOS / TEOS
- BPSG
- WSIX / BW
- PSIN / PSION
- CDCS
- _ METAL ETCH
- _ ION IMPLANT
- _ DIFFUSION
- HTO
- SION
- B-POLY / PAD-POLY / P-POLY
- G-POLY / ACT-POLY / SE-POLY
- DAP-SIN
VIEW POWERPOINT PRESENTATION:
Typical HPS Installation Points
DOWNLOAD A PDF BROCHURE:
HPS Spec Sheet
TO LEARN MORE:
Exhaust Management
Inquiry Form |
BENEFITS
- Increases Pump MTBF
- Reduces unscheduled down time
- Eliminates hot external pipes
- Reduces toxic material build-up
- Eliminates particle blow-back
- Increases safety
- Low Monthly Operating Costs
FEATURES
- Competitive Installation Costs compared to Heating Jackets
- Eliminates pipe cold spots that can develop with heating jackets
- Easy to install
- Controller monitors activity
- Quiet
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