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PROCESS GAS APPLICATIONS
 

DD Series Dry Pumps
Overview

    DD105       (62 cfm )
DD605      (324 cfm)
DD1205    (588 cfm)
DD2005  (1206 cfm)
DD255      (150 cfm)
DD1055    (500 cfm)
DD1855    (942 cfm)
DD2055  (1030 cfm)
DD3055  (1736 cfm)
DD3555  (2148 cfm)
 
 
HD / LD Series Dry Pumps
Overview
   

HD120        (70 cfm)
HD600      (250 cfm)
HD1200    (650 cfm)
LD120        (70 cfm)
LD1000    (530 cfm)

 
 
AI Series Dry (Oil Free) Vacuum PUmps
Overview
   

ISP-90        (3.8 cfm)
ISP-250C   (10.6 cfm)
ISP-500C    (21.2 cfm)
ISP-1000    (42.4 cfm)
DVSL 100B (4.2 cfm)
DVSL 501B(18.4 cfm)

 

LD Series Overview
 

 

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  Contact
 

Phone
970-240-9429

Fax
970-240-8996

Email
Sales
Applications
Service

Address
P.O. Box 177
Montrose, CO 81402

 

LD Series pumps incorporate LOT’s proven screw pumping technology and are compact, lightweight solutions for Point of Use Applications.  They provide higher pumping speeds than AI series pumps while occupying minimum Fab Space.

Applications

  • Load Lock
  • Transfer Chambers
  • PVD
  • Preclean
  • Metrology & Inspection
  • General Vacuum