The SICERA Cryopump product family was developed to meet the demand in the high-volume production of semiconductor wafers, flat panel displays and other semiconductor type products for innovative, eco-friendly cryopumps that also meet stringent technical requirements. The newly redesigned SICERA Cryopump combines proven cryocooler technology with proprietary inverter technology to reduce energy costs by industry leading levels.
|Electrical Supply||3 Phase
200-230 V, 50/60 Hz
378-528 V, 50/60 Hz
|PowerConsumption||0.9 kW/pump (KZ-8L)
1.5 kW/pump (KZ-12L)
|AmbientTemperature||5-35 ºC (41-95 °F)|
|Cooling water (Inlet)||4-10 L/min. (1.1-2.6 gal./min.)
4-28 °C (40-82 °F)
|Dimensions(HxWxD)||865 x 455 x 660 mm
(34.1 x 17.9 x 26.0 in.)
|865 x 455 x 640 mm
(34.1 x 17.9 x 25.2 in.)
|Weight||130 kg (287 lbs.)|
- Typical power consumption
- Cooling capacity may degrade if ambient temperature is above 28 °C (82 °F).
Specifications subject to change without notice.