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The SICERA Cryopump product family was developed to meet the demand in the high-volume production of semiconductor wafers, flat panel displays and other semiconductor type products for innovative, eco-friendly cryopumps that also meet stringent technical requirements. The newly redesigned SICERA Cryopump combines proven cryocooler technology with proprietary inverter technology to reduce energy costs by industry leading levels.
SICERA Crompumps and Cryocoolers Product Image

Specifications

  CSW-61C CSW-61D
Electrical Supply 3 Phase
200-230 V, 50/60 Hz
3 Phase
378-528 V, 50/60 Hz
PowerConsumption 0.9 kW/pump (KZ-8L)
1.5 kW/pump (KZ-12L)
AmbientTemperature 5-35 ºC (41-95 °F)
Cooling water (Inlet) 4-10 L/min. (1.1-2.6 gal./min.)
4-28 °C (40-82 °F)
Dimensions(HxWxD) 865 x 455 x 660 mm
(34.1 x 17.9 x 26.0 in.)
865 x 455 x 640 mm
(34.1 x 17.9 x 25.2 in.)
Weight 130 kg (287 lbs.)
Maintenance 30,000 Hours
  1. Typical power consumption
  2. Cooling capacity may degrade if ambient temperature is above 28 °C (82 °F).

Specifications subject to change without notice.