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Marathon CP Series Cryopumps are specifically designed to meet the needs of high vacuum processes. Applications range from custom laboratory equipment to industrial-scale tools.  Makers of semiconductor devices, flat panel displays, test equipment, solar manufacturing and coating and thermal vacuum systems require efficient, robust and reliable systems with a low cost of ownership. The Marathon CP Series of Cryopumps delivers on these needs.

Marathon® CP-8 Cryopump

Marathon® CP-8LP Cryopump

Marathon® CP-250LP Cryopump

Marathon® CP-12 Cryopump

Marathon® CP-16 Cryopump

Marathon® CP-20 Cryopump

Marathon CP Cryopump Specifications

Cryopump Model
Marathon® CP
CP-8 CP-8LP CP-250LP CP-12 CP-16 CP-20
Air liters/second 1,500 1,800 3,000 3,600 4,800 9,700
Water liters/second 4,200 4,200 6,300 9,560 17,300 29,100
Argon liters/second 1,250 1,500 2,500 3,100 4,100 8,300
Hydrogen liters/second 2,300 3,000 5,000 7,300 12,000 14,000
Argon Throughput torr liters/second 11.0 11.0 11.0 12.6 11.4 11.3
sccm 870 870 870 1,000 900 895
Argon Capacity standard liters @ 1 x10-6 torr 1,200 1,600 1,600 3,100 5,500 6,000
Hydrogen Capacity standard liters @ 5 x10-6 torr 25 23 30 50 50 33
Crossover Rating torr-liters 220 220 300 650 500 400
Cooldown Time minutes 75 110 110 90 135 190
Weight kg (lbs.) 16.8 (37) 17.9 (39.5) 20 (44) 40.8 (90) 49.9 (110) 77.1 (170)

 

 

Options

  CP-8 CP-8LP CP-250LP CP-12 CP-16 CP-20
HC-4E      
HC-8E  
F-70
Zephyr