Call: 1-866-Dry-Pump (1-866-379-7867)
SICERA-KZ-12L1 Available Configurations

  • ANSI 10 in. Flange
  • Standard Fully-Automated Operation
  • SHI Proprietary Inverter Technology
Standard Scope of Supply

  • KZ-12L Cryopump
  • CSW-61C/D Compressor
  • Remote Cryopump Controller with RS-485 Cables
  • Flexible Gas Lines
  • Power Cables

Resources

Suggested Applications

semiconductor-iconSemiconductor

Specifications

Pumping Speed Air 4,500 liters/second
Water 9,500 liters/second
Argon 3,500 liters/second
Hydrogen 5,500 liters/second
Throughput Argon 11.3 torr-liters/second

(900 sccm)

Capacity Argon (at 1×10-6 torr) 2,000 standard liters
Hydrogen (at 5×10-6 torr) 35 standard liters
Crossover Rating 150 torr-liters
Cooldown Time 100 Minutes
Weight 40 kg (88.2 lbs.)
Dimensions (HxWxD) 230 x 518 x 689 mm

(9.1 x 20.4 x 27.1 in.)

Maintenance 12,000 Hours
Inlet Flange ANSI 10 in.

Specifications subject to change without notice.