Call: 1-866-Dry-Pump (1-866-379-7867)
SICERA-KZ-8L1 Available Configurations

  • ICF 253 mm Flange
  • Standard Fully-Automated Operation
  • SHI Proprietary Inverter Technology
Standard Scope of Supply

  • KZ-8L Cryopump
  • CSW-61C/D Compressor
  • Remote Cryopump Controller with RS-485 Cables
  • Flexible Gas Lines
  • Power Cables

Resources

Suggested Applications

semiconductor-iconSemiconductor

Specifications

Pumping Speed Air 1,500 liters/second
Water 4,000 liters/second
Argon 1,200 liters/second
Hydrogen 2,200 liters/second
Throughput Argon 8.8 torr-liters/second
(700 sccm)
Capacity Argon (at 1×10 torr) 1,000 standard liters
Hydrogen (at 5×10-6 torr) 16 standard liters
Crossover Rating 150 torr-liters
Cooldown Time 70 Minutes
Weight 32 kg (70.6 lbs.)
Dimensions (HxWxD) 230 x 415 x 615 mm
(9.1 x 16.3 x 24.2 in.)
Maintenance 12,000 Hours
Inlet Flange ICF 253 mm

Specifications subject to change without notice.