Anest Iwata Dry Scroll Pumps2018-08-23T15:57:57+00:00

Anest Iwata Series Dry Vacuum Pumps

Anest Iwata Series Dry Vacuum Pumps

Anest Iwata scroll pumps are air-cooled, do not require nitrogen purge, and provide clean pumping at low capital cost. The unique patented balance design overcomes problems associated with other scroll pumps such as low Mean Time Between Failure, vibration, tip seal particle generation and premature bearing failure. AI’s modular design provides for quick on-site module exchanges when maintenance is needed.

The Benefits of Oil-Free Pumping are many and an AI pump may be the immediate solution to oil contamination and disposal issues presented by your existing oil lubricated pumps.

ISP Series Pumps are designed for dry clean inert gas pumping applications with < 25 grams of water per day in the vacuum stream.  They are cool, quiet, and highly efficient due to their unique patented balanced design.

DVSL Series Pumps are designed for high vapor load pumping and have their bearings completely isolated from the vacuum stream. Bearing lubrication is not subject to attack by process vapors, nor is there any risk of back-migration of lubricant into the vacuum area.  DVSL pumps can handle vapor loads comparable to an RV pump using gas ballast techniques.

Typical Applications

  • Scanning electron microscopes
  • Ion implanters
  • Linear accelerators
  • Turbo-molecular pump backing
  • Load locks
  • Surface analysis
  • Lamp/tube evacuation
  • Leak detectors
  • Hermetic systems
  • Electron beam processes
  • Laboratory applications
  • Sputtering systems

Benefits

  •  Oil-free
  •  High effective pumping speed
  •  Low ultimate pressure
  •  Low noise level
  •  Low vibration operation
  •  Can run indefinitely at Atmospheric inlet pressure
  •  Low weight
  •  Air cooling
  •  Low power consumption
  •  Integrated hour meter
The History of Anest Iwata Manufactured Scroll Pumps
ISP Brochure
DVSL Brochure

AVAILABLE PRODUCTS

Technical DataUnitsISP-50ISP-90ISP-250ISP-500ISP-1000DVSL-100DVSL-501
Displacement (50Hz)CFM (LPM)1.8 (50)3.2 (90)8.8 (250)17.7 (500)35.3 (1000)3.5 (100)15.2 (430)
Displacement (60Hz)CFM (LPM)2.1 (60)3.8 (108)10.6 (300)21.2 (600)42.4 (1200)4.2 (120)18.4 (520)
Operating Temperature Rangeo - C0 - 405C~40C / 41~1045C~40C / 41~1045C~40C / 41~1045C~40C / 41~10410C~40C/50~1040 - 400 - 40
Ultimate PressuremTorr )Pa)11037127.57.5150 (20)75 (10)
Motor Power RatingkW/HP11.546140.35 / 0.471.1 / 0.8
Voltage1-Phase100/115/200/230V100/115/200/230V100/115/200/230V100/115/200/230VN/AN/AN/A
Voltage3-PhaseN/AN/A200/208/230/380/
415/460V
200/208/230/380/
415/460V
200/208/230/380/
415/460V
N/A200/460
Noise Level (with air flush)dB A57
5766687459 (68)65 (68)
Weightlbs. (kg)12
29 (13)55 (25)3-Phase: 88(40)
1-Phase: 102(46.2)
121 (55)41 / 18.589 / 40
Dimensions (LxWxH)inches
mm
124.80x61.02x89.37
317x155x227
12.13x7.17x8.86
308x182x225
10x15.75x13.25
252x400x336
17.4x12.9x14.6
442x328x371
18.39x15.35x15
467x390x381
14.9x9.5x9.3
378x240x236
19.5x12.25x11.75
496x311x299
Inlet ConnectionNW25
25
25
40
40
25
25
Outlet Connection 1616161625401625
Water Handlingg/day3
55
25
25
25
100+100+

For pricing and answer to your questions, please call our Sales Department at 866-DRY-PUMP (866-379-7867)