Kashiyama SDE Series
Available up to 200kL/min.
Best for large wafer and FPD.
Durable to various processes.
|Max Pumping Speed|
|3Phase AC200～220V, 380～480V (all models)|
|*1 Smaller than 20,000L/min pumps are also available.
*2 Without N2 purge.
*3 Package size. Dimensions vary by specification.
* Contact us about international standard compliance. Specifications and name of products are subject to change without prior notice.
For pricing and answer to your questions, please call our Sales Department at 866-DRY-PUMP (866-379-7867)