AVAILABLE PRODUCTS

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Kashiyama SDE Series

Large Capacity SDE Series:  Standard type for harsh process

Available up to 200kL/min.

Best for large wafer and FPD.

Durable to various processes.

Kashiyama SDE Series S-P Graph

Specifications/Products*1SDE1220SDE20M20SDE30M20SDE4060SDE4030M20SDE8060SDE804060
Max Pumping Speed
[L/min]*2
20,00030,00050,00060,00080,000120,000190,000
Ultimate pressure
[Pa]*2
0.50.50.50.80.50.80.5
Supply Voltage
(50/60Hz)
3Phase AC200~220V, 380~480V (all models)
Dimensions [mm]
W*H*L*3
W:400
H:780
L:930
W:450
H:950
L:1000
W:450
H:950
L:1000
W:750
H:1200
L:1600
W:800
H:1580
L:1320
W:850
H:1220
L:1600
W:1000
H:1980
L:1850
*1 Smaller than 20,000L/min pumps are also available.
*2 Without N2 purge.
*3 Package size. Dimensions vary by specification.
* Contact us about international standard compliance. Specifications and name of products are subject to change without prior notice.

For pricing and answer to your questions, please call our Sales Department at 866-DRY-PUMP (866-379-7867)