The OMNI Solution

DEPLOY an OMNI® Helium Compressor and operate both standard and auto-regen cryopumps from different manufacturers on the same tool at the same time.

  • OMNIs drive Sumitomo Marathon®, CTI-Brooks CryoTorr®, CTI-Brooks On-Board®, Oxford-Trillium Cryo-Plex®.
  • OMNIs drive 3-phase and 2-phase configured pumps

BREAK OUT of the OEM technology silo that may be limiting your process and equipment performance.

OMNI® Compressors

Process Tools with a CTI Network Controller

  • The CTI Network Controller manages information between the Tool and CT-OnBoard Pumps.
  • It communicates in BitBus.
  • The OMNI®-900 Compressor can run 1 – 3 Cryo-Torr OB Pumps on a tool with a Host CPU (Endura).
  • The OMNI®-900 Compressor can run 1 – 3 Cryo-Torr On-Board Pumps that are connected to a CTI Network Controller.

 

Pre-OMNI and Post-OMNI Flowcharts

Pre-OMNI and Post-OMNI Flowcharts

Click the chart for a closer look

DEPLOY an OMNI® Helium Compressor and operate both standard and auto-regen cryopumps from different manufacturers on the same tool at the same time.

  • OMNIs drive Sumitomo Marathon®, CTI-Brooks CryoTorr®, CTI-Brooks On-Board®, Oxford-Trillium Cryo-Plex®, and Ulvac Cryo-U® cryopumps.
  • OMNIs drive 3-phase and 2-phase configured pumps

DRIVE cyropumps selected and installed based on performance, quality, serviceability, and support, instead of what is available from a single OEM.

SERVICE AND SUPPORT all of the above equipment from a single provider which includes full warranty coverage.

BREAK OUT of the OEM technology silo that may be limiting your process and equipment performance.

Pre-OMNI and Post-OMNI Flowcharts