Marathon CP-12 Cryopump
Marathon® CP Series Cryopumps are specifically designed to meet the needs of high vacuum processes. Applications range from custom laboratory equipment to industrial-scale tools. Makers of semiconductor devices, flat panel displays, test equipment, solar manufacturing and coating and thermal vacuum systems require efficient, robust and reliable systems with a low cost of ownership. The Marathon® CP Series of Cryopumps delivers on these needs.
Available Configurations
- All Industry-Standard Flanges
- Standard Manual Operation
- Optional Fully-Automated Operation with Marathon® Cryopump Controller
- Displex® and Whisper® Technology
Standard Scope of Supply
- CP-12 Cryopump
- HC-8E4 or F-70L/H Compressor
- 3 m (10 ft.) Flexible Gas Lines
- 3 m (10 ft.) Cold Head Cable
- Tool Kit
Cryopump Model | CP-12 | |
---|---|---|
Cryopump Model | CP-12 | |
Air | (liters/second) | 3,600 |
Water | (liters/second) | 9,560 |
Argon | (liters/second) | 3,100 |
Hydrogen | (liters/second) | 7,300 |
Argon Throughput | (torr liters/second) | 12.6 |
(sccm) | 1,000 | |
Argon Capacity | (standard liters @ 1 x10-6 torr) | 3,100 |
Hydrogen Capacity | (standard liters @ 5 x10-6 torr) | 50 |
Crossover Rating | (torr-liters) | 650 |
Cooldown Time | (minutes) | 90 |
Weight | kg (lbs) | 40.8 (90) |
OPTIONS |
||
HC-4E | ||
HC-8E | ||
F-70 | ||
Zephyr |
For pricing and answers to your questions, please call our Sales Department at 866-DRY-PUMP (866-379-7867)