Marathon CP-20 Cryopump2018-08-15T15:37:16+00:00

Marathon CP-20 Cryopump

Marathon CP-20 cryopump

Marathon® CP Series Cryopumps are specifically designed to meet the needs of high vacuum processes. Applications range from custom laboratory equipment to industrial-scale tools.  Makers of semiconductor devices, flat panel displays, test equipment, solar manufacturing and coating and thermal vacuum systems require efficient, robust and reliable systems with a low cost of ownership.  The Marathon® CP Series of Cryopumps delivers on these needs.

Available Configurations

  • All Industry-Standard Flanges
  • Standard Manual Operation
  • Optional Fully-Automated Operation with Marathon® Cryopump Controller
  • Displex® and Whisper® Technology

Standard Scope of Supply

  • CP-20 Cryopump
  • F-70L/H Compressor
  • 3 m (10 ft.) Flexible Gas Lines
  • 3 m (10 ft.) Cold Head Cable
  • Tool Kit
Cryopump ModelCP-20
Cryopump ModelCP-20
Air(liters/second)9,700
Water(liters/second)29,100
Argon(liters/second)8,300
Hydrogen(liters/second)14,000
Argon Throughput(torr liters/second)11.3
(sccm)895
Argon Capacity(standard liters @ 1 x10-6 torr)6,000
Hydrogen Capacity(standard liters @ 5 x10-6 torr)33
Crossover Rating(torr-liters)400
Cooldown Time(minutes)190
Weightkg (lbs)77.1 (170)

OPTIONS

HC-4E
HC-8E
F-70
Zephyr

For pricing and answers to your questions, please call our Sales Department at 866-DRY-PUMP (866-379-7867)