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Dry Vacuum Pump | Scroll Pump Repair | SynSysCo

Anest Iwata Series Dry Vacuum Pumps

Anest Iwata scroll pumps are air-cooled, do not require nitrogen purge, and provide clean pumping at low capital cost. The unique patented balance design overcomes problems associated with other scroll pumps such as low Mean Time Between Failure, vibration, tip seal particle generation and premature bearing failure. AI’s modular design provides for quick on-site module exchanges when maintenance is needed.

The Benefits of Oil-Free Pumping are many and an AI pump may be the immediate solution to oil contamination and disposal issues presented by your existing oil lubricated pumps.

BENEFITS:

  •  Oil-free
  •  High effective pumping speed
  •  Low ultimate pressure
  •  Low noise level
  •  Low vibration operation
  •  Can run indefinitely at Atmospheric inlet pressure
  •  Low weight
  •  Air cooling
  •  Low power consumption
  •  Integrated hour meter

ISP Series Pumps are designed for dry clean inert gas pumping applications with < 25 grams of water per day in the vacuum stream.  They are cool, quiet, and highly efficient due to their unique patented balanced design.

DVSL Series Pumps are designed for high vapor load pumping and have their bearings completely isolated from the vacuum stream. Bearing lubrication is not subject to attack by process vapors, nor is there any risk of back-migration of lubricant into the vacuum area.  DVSL pumps can handle vapor loads comparable to an RV pump using gas ballast techniques.

Typical applications

  • Scanning electron microscopes
  • Ion implanters
  • Linear accelerators
  • Turbo-molecular pump backing
  • Load locks
  • Surface analysis
  • Lamp/tube evacuation
  • Leak detectors
  • Hermetic systems
  • Electron beam processes
  • Laboratory applications
  • Sputtering systems

Resources

Technical DataUnitsISP-50ISP-90ISP-250CISP-500CISP-1000
Displacement (60Hz)CFM (LPM)2.1 (60)3.8 (108)10.6 (300)21.2 (600)42.4 (1200)
Displacement (50Hz)CFM (LPM)1.8 (50)3.2 (90)8.8 (250)17.7 (500)35.3 (1000)
Operating Temperature RangeC/F5C~40C / 41~1045C~40C / 41~1045C~40C / 41~1045C~40C / 41~10410C~40C/50~104
Ultimate PressuremTorr11238127.57.5
Motor Power RatingkW11.54614
Voltage1 Phase100/115/200/230V100/115/200/230V100/115/200/230V100/115/200/230V n/a
Voltage3 Phase n/a n/a200/208/230/380/
415/460V
200/208/230/380/
415/460V
200/208/230/380/
415/460V
Noise Level (w air flush)dB A5757666874
Weightlbs. (kg)1229 (13)55 (25)3 Phase (88(40))
1 Phase (102(46.2))
121 (55)
Dimensions (LxWxH)inches
mm
124.80x61.02x89.37
317x155x227
12.13x7.17x8.86
308x182x225
10x15.75x13.25
252x400x336
17.4x12.9x14.6
442x328x371
18.39X15.35X15
467X390X381
Inlet ConnectionNW2525254040
Outlet Connection161616162540
Water Handlingg/day355252525

Technical DataUnitsDVSL-100BDVSL-501B
Displacement (60Hz)CFM (LPM)4.2 (120)18.4 / 520
Displacement (50Hz)CFM (LPM)3.5 (100)15.2 / 430
Operating Temp RangeoC5 - 405 - 40
Ultimate PressuremTorr (Pa)150 (20)75 (10)
Motor Power RatingkW/HP0.35 / 0.471.1 / 0.8
Voltage-(1 phase) 115/230V(3 phase) 200/460
Noise Level (w Air Flush)dB A59 (68)65 (68)
Weightlbs. (kg)41 / 18.589 / 40
Dimensions
(LxWxH)
inches
mm
14.9x9.5x9.3
378x240x236
19.5x12.25x11.75
496x311x299
Inlet ConnectionNW2525
Outlet ConnectionNW1625
Water Handlingg/day100+100+
Air Flush Flow Ratel/min1.02 l/min1.02 l/min