Anest Iwata Scroll Meister ISP Series Dry Scroll Pumps
Anest Iwata pumps are air-cooled, do not require nitrogen purge, and provide clean pumping at low capital cost. The unique patented balance design overcomes problems associated with other scroll pumps such as low Mean Time Between Failure, vibration, tip seal particle generation and premature bearing failure. AI’s modular design provides for quick on-site module exchanges when maintenance is needed.
The Benefits of Oil-Free Pumping are many and an AI pump may be the immediate solution to oil contamination and disposal issues presented by your existing oil lubricated pumps.
ISP Series Pumps are designed for dry clean inert gas pumping applications with < 25 grams of water per day in the vacuum stream. They are cool, quiet, and highly efficient due to their unique patented balanced design.
DVSL Series Pumps are designed for high vapor load pumping and have their bearings completely isolated from the vacuum stream. Bearing lubrication is not subject to attack by process vapors, nor is there any risk of back-migration of lubricant into the vacuum area. DVSL pumps can handle vapor loads comparable to an RV pump using gas ballast techniques.
Typical Applications
- Scanning electron microscopes
- Ion implanters
- Linear accelerators
- Turbo-molecular pump backing
- Load locks
- Surface analysis
- Lamp/tube evacuation
- Leak detectors
- Hermetic systems
- Electron beam processes
- Laboratory applications
- Sputtering systems
Benefits
- Oil-free
- High effective pumping speed
- Low ultimate pressure
- Low noise level
- Low vibration operation
- Can run indefinitely at Atmospheric inlet pressure
- Low weight
- Air cooling
- Low power consumption
- Integrated hour meter
| Technical Data | Units | ISP-50 | ISP-90 | ISP-250 | ISP-500 | ISP-1000 | DVSL-100 | DVSL-501 |
|---|---|---|---|---|---|---|---|---|
| Displacement (50Hz) | CFM (LPM) | 1.8 (50) | 3.2 (90) | 8.8 (250) | 17.7 (500) | 35.3 (1000) | 3.5 (100) | 15.2 (430) |
| Displacement (60Hz) | CFM (LPM) | 2.1 (60) | 3.8 (108) | 10.6 (300) | 21.2 (600) | 42.4 (1200) | 4.2 (120) | 18.4 (520) |
| Operating Temperature Range | o - C | 0 - 405C~40C / 41~104 | 5C~40C / 41~104 | 5C~40C / 41~104 | 5C~40C / 41~104 | 10C~40C/50~104 | 0 - 40 | 0 - 40 |
| Ultimate Pressure | mTorr )Pa) | 110 | 37 | 12 | 7.5 | 7.5 | 150 (20) | 75 (10) |
| Motor Power Rating | kW/HP | 1 | 1.5 | 4 | 6 | 14 | 0.35 / 0.47 | 1.1 / 0.8 |
| Voltage | 1-Phase | 100/115/200/230V | 100/115/200/230V | 100/115/200/230V | 100/115/200/230V | N/A | N/A | N/A |
| Voltage | 3-Phase | N/A | N/A | 200/208/230/380/ 415/460V | 200/208/230/380/ 415/460V | 200/208/230/380/ 415/460V | N/A | 200/460 |
| Noise Level (with air flush) | dB A | 57 | 57 | 66 | 68 | 74 | 59 (68) | 65 (68) |
| Weight | lbs. (kg) | 12 | 29 (13) | 55 (25) | 3-Phase: 88(40) 1-Phase: 102(46.2) | 121 (55) | 41 / 18.5 | 89 / 40 |
| Dimensions (LxWxH) | inches mm | 124.80x61.02x89.37 317x155x227 | 12.13x7.17x8.86 308x182x225 | 10x15.75x13.25 252x400x336 | 17.4x12.9x14.6 442x328x371 | 18.39x15.35x15 467x390x381 | 14.9x9.5x9.3 378x240x236 | 19.5x12.25x11.75 496x311x299 |
| Inlet Connection | NW | 25 | 25 | 25 | 40 | 40 | 25 | 25 |
| Outlet Connection | 16 | 16 | 16 | 16 | 25 | 40 | 16 | 25 |
| Water Handling | g/day | 3 | 55 | 25 | 25 | 25 | 100+ | 100+ |
For pricing and answer to your questions, please call our Sales Department at 866-DRY-PUMP (866-379-7867)