Announcing the Kashiyama NeoDry® N₂ Purge Unit for Hydrogen, Corrosive Gases, Solvents, and Semiconductor Applications
Protect critical vacuum processes with the Kashiyama NeoDry N₂ Purge Unit. Designed for hydrogen, corrosive gases, solvents, and semiconductor applications, this oil-free, air-cooled dry vacuum pump delivers reliable performance with advanced nitrogen purge protection.
OMNI® Helium Compressors & Cryogenic Systems
Global source for cryogenic system upgrades and support in 200mm Semiconductor, PVD, R&D, and Industrial Processes
OMNI® HELIUM COMPRESSORS REPLACE THE FOLLOWING COMPRESSOR MODELS
- SynSysCo’s OMNI system replaces the need for multiple compressors, pumps, and control systems, allowing you to upgrade cryogenic components individually.
- It integrates multiple cryogenic pumps, regardless of manufacturer, to run simultaneously on the same tool.
Vacuum & Cryogenic Solutions
Systems Built Around Your Application
Explore SynSysCo solutions for helium compression, cryogenic pumping,
and dry vacuum applications. Choose a product family below for key
details, or visit the full product section to explore available models,
configurations, and replacement options.
Cryogenic Systems
OMNI® Helium Compressors
Upgrade legacy cryogenic systems without replacing the entire
installation. OMNI compressors support phased upgrades and can
operate cryopumps from multiple manufacturers.
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- Drive 2-phase or 3-phase pumps.
- Operate standard and auto-regen pumps.
- Uses proven Sumitomo helium compressor technology.
- Supports cross-migration of cryopump platforms one pump at a time.
- Available in air-cooled and water-cooled versions.
- Designed for very quiet, smooth operation.
- Made in the USA.
- 2-year warranty.
OMNI systems also provide replacement paths for multiple
legacy Edwards CTI and Trillium compressor configurations.
Cryogenic Pumps
Marathon® Cryogenic Pumps
Sumitomo Marathon cryopumps support semiconductor, PVD,
space-simulation, coating, industrial, and R&D applications
and integrate with OMNI cryogenic systems.
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- Designed for demanding high-vacuum applications.
- Available in multiple pump sizes and configurations.
- Supports semiconductor, coating, flat-panel, and R&D processes.
- Designed for low-noise and low-vibration operation.
- Standard and automated configurations are available.
- Backed by service, maintenance, parts, and technical support.
Marathon cryopumps can be integrated with OMNI cryogenic
systems to create a flexible approach to system upgrades.
Dry Vacuum Pumps
Kashiyama NeoDry Pumps
Oil-free dry vacuum pumps for PVD, etch, CVD, ALD,
space simulation, analytical equipment, and other demanding
vacuum processes.
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- Oil-free dry vacuum technology.
- Solutions for dry inert gas and high-moisture applications.
- Options for mildly aggressive process gases.
- Suitable for load locks, PVD systems, analytical instruments, and electron microscopy.
- Available in multiple pumping capacities for different vacuum requirements.
- Can be paired with SynSysCo vacuum gauges, fittings, and accessories.
Already replacing another manufacturer’s pump? Use our new
NeoDry Pump Replacement Matrix to help identify the appropriate
Kashiyama model.
Pump Replacement Tool
Find the Right NeoDry Replacement Pump
Have an existing dry vacuum pump you need to replace?
Use the NeoDry Pump Replacement Matrix to compare your current
manufacturer and model with the recommended Kashiyama NeoDry pump.
Filter by pumping speed, motor output, voltage, connection type,
and other key specifications.
Testimonials
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