Marathon CP-16 Cryopump2018-08-15T15:36:17+00:00

Marathon CP-16 Cryopump

Marathon® CP-16 Cryopump

Marathon® CP Series Cryopumps are specifically designed to meet the needs of high vacuum processes. Applications range from custom laboratory equipment to industrial-scale tools.  Makers of semiconductor devices, flat panel displays, test equipment, solar manufacturing and coating and thermal vacuum systems require efficient, robust and reliable systems with a low cost of ownership.  The Marathon® CP Series of Cryopumps delivers on these needs.

Available Configurations

  • All Industry-Standard Flanges
  • Standard Manual Operation
  • Optional Fully-Automated Operation with Marathon® Cryopump Controller
  • Displex® and Whisper® Technology

Standard Scope of Supply

  • CP-16 Cryopump
  • HC-8E4 or F-70L/H Compressor
  • 3 m (10 ft.) Flexible Gas Lines
  • 3 m (10 ft.) Cold Head Cable
  • Tool Kit
Cryopump ModelCP-16
Cryopump ModelCP-16
Air(liters/second)4,800
Water(liters/second)17,300
Argon(liters/second)4,100
Hydrogen(liters/second)12,000
Argon Throughput(torr liters/second)11.4
(sccm)900
Argon Capacity(standard liters @ 1 x10-6 torr)5,500
Hydrogen Capacity(standard liters @ 5 x10-6 torr)50
Crossover Rating(torr-liters)500
Cooldown Time(minutes)135
Weightkg (lbs)49.9 (110)

OPTIONS

HC-4E
HC-8E
F-70
Zephyr

For pricing and answers to your questions, please call our Sales Department at 866-DRY-PUMP (866-379-7867)