OMNI™ Helium Compressors
OMNI™ Helium Compressors integrate Sumitomo Marathon® Cryopumps with other cryopump systems to provide OEM and end user with new possibilities in system performance, value and support.
For end users, OMNI™ Helium Compressors are excellent replacement units for legacy helium compressors in coating, 200mm semiconductor and a variety of other industrial and R&D applications. OMNI™ Helium Compressors drive Sumitomo Marathon® Cryopumps, CTI CryoTorr®, CTI OnBoard® and Trillium CryoPlex® Cryopumps on the same tool at the same time.
For pricing and answers to your questions, please call our Sales Department at 866-DRY-PUMP (866-379-7867)